Reducing ion-beam noise of vacuum arc ion sources
نویسندگان
چکیده
منابع مشابه
Temporal development of ion beam mean charge state in pulsed vacuum arc ion sources.
Vacuum arc ion sources, commonly also known as "Mevva" ion sources, are used to generate intense pulsed metal ion beams. It is known that the mean charge state of the ion beam lies between 1 and 4, depending on cathode material, arc current, arc pulse duration, presence or absence of magnetic field at the cathode, as well as background gas pressure. A characteristic of the vacuum arc ion beam i...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2002
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.1427039